pecvd for sio & sinx deposition cathode pecvd for high-rate sio and sinx deposition plasma etching compound semiconductor etching si drie for mems and tsv plasma dicing of si & iii-v (gaas/inp/gan) algan/gan etch for gan power device fabrication sic trench etch for sic power device fabrication sapphire...
application | custom designed tooling for optical alignment – level sensor tooling. market segment | semiconductor business activities | specification and concept design, engineering and prototyping, performance validation, small series production. the trend in doubling transistor density of computer...