Parts for semiconductor devices

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tool automation applications in semiconductor wafer processing and other complex manufacturing environments. we offer a range of systems—available in numerous configurations for mm to mm wafer transport—that meet specific manufacturing environment and process requirements. marathontm express marathon

express vacuum transport system the marathon express® is a modular, configurable vacuum transport system (vts) optimized for superior vacuum performance and high throughput for mm, mm, mm, and mm wafer size applications. atmospheric systems jettm atmospheric transport system jet atmospheric transport...

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tool automation applications in semiconductor wafer processing and other complex manufacturing environments. we offer a range of systems—available in numerous configurations for mm to mm wafer transport—that meet specific manufacturing environment and process requirements. marathontm express marathon...

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spartantm sorters | unified wafer management system | brooks automation feedback global offices > products & solutions > semiconductor automation > factory automation solutions >spartan sorters semiconductor automation products & solutions semiconductor automation wafer handling robotics wafer handling

tool automation applications in semiconductor wafer processing and other complex manufacturing environments. we offer a range of systems—available in numerous configurations for mm to mm wafer transport—that meet specific manufacturing environment and process requirements. marathontm express marathon...

https://www.brooks.com/products/semiconductor-automation/factory-automation/spartan-sorters