Search Results for: Controllers combined with timing circuits
measuring, sensing, detection or process control means (class / ) with etchant gas supply or exhaust structure located outside of etching chamber (e.g., supply tank, pipe network, exhaust pump, particle filter) (class / ) with mechanical mask, shield or shutter for shielding workpiece (class / ) with
means for passing discrete workpiece through plural chambers (e.g., loadlock) (class / ) with gas inlet structure (e.g., inlet nozzle, gas distributor) (class / ) with plasma generation means remote from processing chamber (class / ) with heating or cooling means for apparatus part other than workpiece...
https://patents.justia.com/patents-by-us-classification/156