tool automation applications in semiconductor wafer processing and other complex manufacturing environments. we offer a range of systems—available in numerous configurations for mm to mm wafer transport—that meet specific manufacturing environment and process requirements. brochure achieve new levels...
) rsp euv pod stocker semi-automatic m fully-automatic rsp stocker the brooks m rsp stocker provides fully-automated pod handling with an integrated continuous purge system for each individual pod. key features fully automated rsp handling class mini-environment/esd/amc n /xcda purge for each pod purge...
system for smif pods rps-c automated storage and management system for smif pods the rps-c is a fully automated standalone storage and inventory management system for reticle smif pods (rsp) with optional xcda or n purge. it is based on the tec-sem modular, cartesian product platform, allowing a high...
transport systems marathontm express atmospheric systems semiconductor contamination control factory automation solutions asset tracking & rfid vce load locks vce load locks brooks is a global leader in the production of vacuum handling robots and modules forsemiconductor wafer processing, flat panel...
storage and inspection system the rs-c is a fully automated, highly flexible standalone storage and inspection system for " reticles based on a modular, cartesian platform. the flexibility offered in size, features and functionality make it ideal for a variety of applications in new or existing production...
storage, retrieval and transfer between a variety of reticle carrier types. the high throughput rxi optimizes the scanner/stepper utilization. the rxi is suitable for a variety of tasks: incoming inspection fast automated qualification between process cycles substitute mask handling by operators for...
and reliable robots for operation in vacuum and isolation environments. setting the industry standard for vacuum robot automation, brooks' magnatran family of robots deliver unparalleled cleanliness, repeatability and throughput. these state-of-the-art vacuum robots, designed specifically for tool automation...
buffer the rx family is an innovative combination of reticle stocker and carrier buffer for manageing the reticles throughout the fab. the rx is a fully automated reticle management system that combines a reticle and carrier sort and storagesystem for up to reticles on the smallest footprint. the reticles...
tool automation applications in semiconductor wafer processing and other complex manufacturing environments. we offer a range of systems—available in numerous configurations for mm to mm wafer transport—that meet specific manufacturing environment and process requirements. marathontm express marathon...
tool automation applications in semiconductor wafer processing and other complex manufacturing environments. we offer a range of systems—available in numerous configurations for mm to mm wafer transport—that meet specific manufacturing environment and process requirements. marathontm express marathon...