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, exposure apparatus, exposure method, control apparatus, control method, information generation apparatus, information generation method and device manufacturing method publication number: abstract: a charged particle beam optical apparatus has a plurality of irradiation optical systems each of which...
tracker or our github source code repository . apis open library has a restful api , best used to link into open library data in json, yaml and rdf/xml. there's also an earlier json api , which is deprecated now. this is only retained for backward compatibility. you can also return bibliographic data by...