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for low ("rough") vacuum ranges (higher pressures) between atmospheric and torr, bourdon tubes, bellows, active strain gauges, and capacitance sensors are all suitable measurement devices. for mid-range vacuum requirements, those in the + torr to - torr range there are several choices including the capacitance
manometer, for more accurate measurements, or the thermocouple or pirani type gauges. for high vacuum, from - torr to - torr, either cold cathode or bayard-alpert hot cathode gauges are used. both require frequent calibration. for ultra-high vacuum, below - torr, cold cathode or bayard-alpert hot cathode...
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