Search Results for: Apparatus use x-ray
, exposure apparatus, exposure method, control apparatus, control method, information generation apparatus, information generation method and device manufacturing method publication number: abstract: a charged particle beam optical apparatus has a plurality of irradiation optical systems each of which
respectively. pixels that are provided at adjacent microlenses among the microlenses and that receive lights of same color components, are adjacently arranged. type: grant filed: december , date of patent: february , assignee: nikon corporation inventor: hironobu murata measurement processing device, x-ray...
https://patents.justia.com/company/nikon